Zeiss Merlin Gemini Scanning Electron Microscope

The high-resolution field emission scanning electron microscope and an energy dispersive X-ray microarea analysis (EDX) are used to run topography and morphology tests.

A field emitter gives magnifications of up to 500.000 : 1, which corresponds to a resolution of 0.6 nanometres on a sample surface. In addition, very low acceleration voltages can be selected, which permits testing of non-conductive materials like biological samples, plastics or ceramics.

Using four detectors, tests and analyses are performed at acceleration voltages of 0.1 kV to 30 kV in secondary and backscattered electron contrasts.